12.4.3 Matrix Effects and Interference 486 12.4.3.1 Spectral Interferences 486 12.43.2 Matrix Effects and Chemical Interferences 487 12.4.4 Quantitative and Qualitative Analysis 488 12.4.5 Advantages and Limitations 491 12.4.5.1 Absolute and Relative Sensitivity 491 12.4.5.2 Hyphenated Techniques 491 12.5 Section VI Methods 5: Surface Analysis Techniques 497 13 Surface Analysis Techniques 499 Introductio 13.2 Definition of the Surface 501 13.3 Selection of Method 501 134 Individual Techniques 506 13.4.1 Angle Resolved Ultraviolet Photoelectron Spectroscopy 506 13.4.1.1 Introduction 507 13. 4.1.2 Instrumentation 507 4.1.3 Sample 13.4. 1.4 Analytical Information 507 13.4.1.5 Performance Criteria 507 13.4. 1.6 Applications 50 13.4.1.7 Other Techniques 508 13.4.2 Appearance Potential Spectroscopy 508 13.4.2.1 Introduction 508 13.4.2.2 Instrumentation 508 134.2.3 Sample509 13. 4.2.4 Analytical Information 509 3.4.2.5 Performance Criteria 509 13.4.2.6 Applications 13.4.2.7 Other Techniques 510 13.4.3 Atom Probe Field Ion Microscopy 510 13. 4.3.1 Introduction 510 4.3.2 Instrumentation 510 13.4.3.3 Analytical Information 510 13.43.4 Performance Criteria 510 13.4.3.5 Applications 510 13.4.4 Attenuated Total Reflection Spectroscopy 511 13. 4.4.1 Introduction 511 13.4. 4.2 Instrumentation 511 13.4.4.3 Analytical Information 511 13.4.4.4 Performance Criteria 511 13.4.4.5 Applications 512
12.4.3 Matrix Effects and Interference 486 12.4.3.1 Spectral Interferences 486 12.4.3.2 Matrix Effects and Chemical Interferences 487 12.4.4 Quantitative and Qualitative Analysis 488 12.4.5 Advantages and Limitations 491 12.4.5.1 Absolute and Relative Sensitivity 491 12.4.5.2 Hyphenated Techniques 491 12.5 Summary 493 Section VI Methods 5: Surface Analysis Techniques 497 13 Surface Analysis Techniques 499 13.1 Introduction 499 13.2 Definition of the Surface 501 13.3 Selection of Method 501 13.4 Individual Techniques 506 13.4.1 Angle Resolved Ultraviolet Photoelectron Spectroscopy 506 13.4.1.1 Introduction 507 13.4.1.2 Instrumentation 507 13.4.1.3 Sample 507 13.4.1.4 Analytical Information 507 13.4.1.5 Performance Criteria 507 13.4.1.6 Applications 508 13.4.1.7 Other Techniques 508 13.4.2 Appearance Potential Spectroscopy 508 13.4.2.1 Introduction 508 13.4.2.2 Instrumentation 508 13.4.2.3 Sample 509 13.4.2.4 Analytical Information 509 13.4.2.5 Performance Criteria 509 13.4.2.6 Applications 509 13.4.2.7 Other Techniques 510 13.4.3 Atom Probe Field Ion Microscopy 510 13.4.3.1 Introduction 510 13.4.3.2 Instrumentation 510 13.4.3.3 Analytical Information 510 13.4.3.4 Performance Criteria 510 13.4.3.5 Applications 510 13.4.4 Attenuated Total Reflection Spectroscopy 511 13.4.4.1 Introduction 511 13.4.4.2 Instrumentation 511 13.4.4.3 Analytical Information 511 13.4.4.4 Performance Criteria 511 13.4.4.5 Applications 512 Contents XIII
XIV Contents 512 13. 4.5.1 Introduction 512 4.5.2 Instrumentation 51 13.4.5.4 Analytical Information 513 13.4.5.5 Performance Criteria 51 134.5.6 lications 514 3.4.5.7 Other Techniques 514 13.4.6 Auger Photoelectron Coincidence Spectroscopy 514 13.4.6.1 Introduction 514 13. 4.6.3 Sample 515 3. 4.6.4 Analytical Information 51 13.4.6.5 Performance Criteria 51 13.4.6.6 Applications 516 13. 4.6.7 Other Techniques 516 Charge Particle Activation Analysis 516 3. 4.7.1 Introduction 516 13. 4.7.2 Instrumentation 516 13.4.7.3 Sample 517 13. 4.7.4 Analytical Information 517 13. 4.7.5 Performance Criteria 517 4.7.6 Application 13.4.7.7 Other Technique 518 13.4.8 Diffuse Reflection Spectroscopy 518 13.4.8.1 Introductio 13. 4.8.2 Instrumentation 518 3. 4.8.3 Analytical Information 519 13.4.8.4 Performance Criteria 519 13.4.8.5 Applications 519 3.4.9 Elastic Recoil Detection Analysis 520 3.4.9.2 Instrumentation 520 13.4.9.4 Analytical Information 520 13. 4.9.5 Performance Criteria 521 134.9.6 plications 52 .4.9.7 Other Techniques 13.4. 10 Electron Momentum Spectroscopy 522 13.4.10.2 Instrumentation 523 134.10.3 Sample52 3.4. 10.4 Analytical Information 13.4.10.5 Performan 134.10.6Appl
13.4.5 Auger Electron Spectroscopy 512 13.4.5.1 Introduction 512 13.4.5.2 Instrumentation 512 13.4.5.3 Sample 513 13.4.5.4 Analytical Information 513 13.4.5.5 Performance Criteria 513 13.4.5.6 Applications 514 13.4.5.7 Other Techniques 514 13.4.6 Auger Photoelectron Coincidence Spectroscopy 514 13.4.6.1 Introduction 514 13.4.6.2 Instrumentation 515 13.4.6.3 Sample 515 13.4.6.4 Analytical Information 515 13.4.6.5 Performance Criteria 515 13.4.6.6 Applications 516 13.4.6.7 Other Techniques 516 13.4.7 Charge Particle Activation Analysis 516 13.4.7.1 Introduction 516 13.4.7.2 Instrumentation 516 13.4.7.3 Sample 517 13.4.7.4 Analytical Information 517 13.4.7.5 Performance Criteria 517 13.4.7.6 Application 518 13.4.7.7 Other Technique 518 13.4.8 Diffuse Reflection Spectroscopy 518 13.4.8.1 Introduction 518 13.4.8.2 Instrumentation 518 13.4.8.3 Analytical Information 519 13.4.8.4 Performance Criteria 519 13.4.8.5 Applications 519 13.4.9 Elastic Recoil Detection Analysis 520 13.4.9.1 Introduction 520 13.4.9.2 Instrumentation 520 13.4.9.3 Sample 520 13.4.9.4 Analytical Information 520 13.4.9.5 Performance Criteria 521 13.4.9.6 Applications 522 13.4.9.7 Other Techniques 522 13.4.10 Electron Momentum Spectroscopy 522 13.4.10.1 Introduction 523 13.4.10.2 Instrumentation 523 13.4.10.3 Sample 523 13.4.10.4 Analytical Information 523 13.4.10.5 Performance Criteria 523 13.4.10.6 Applications 523 XIV Contents
13.4.11 Electron Probe Microanalysis 524 13.4.11.1 Introduction 524 3.411.2 Instrumentation 524 13.4.11.3 Sample 13.4.11.4 Analytical Information 524 13.4.11.5 Performance Criteria 525 13.4.11.6 Applications 525 4.12 Electron Stimulated Desorption 525 13.4.12.1 Introduction 525 13.412.2 Instrumentation 525 134.12.3 Sample526 13.4. 12.4 Analytical Information 526 4.12.5 Performance Criteria 526 13.4. 12.6 Applications 526 13.4.13 Electron Stimulated Desorption Ion Angular Distributions 526 13.4.13.1 Introduction 526 13.4.13.2 Instrumentation 527 13413.3 Sample527 13.4. 13.4 Analytical Information 527 13.4.13.5 Performance Criteria 527 13.4. 13.6 Applications 5 13.4.14 Ellipsometry 528 4141 Introduction 528 13.4. 14.2 Instrumentation 528 13414.3 Sample528 13.4. 14.4 Analytical Information 528 13. 4.14.5 Performance Criteria 529 13.4. 14.6 Applications 529 13.4.15 Extended Energy Loss Fine Structure 529 13.4.15.1 Introduction 529 13.4.15.2 Instrumentation 530 13.4.15.3 Analytical Information 530 3.4.15.4 Performance Criteria 530 13.4. 15.5 Applications 530 13.4. 15.6 Other Techniques 530 13.4. 16 Evanescent Wave Cavity Ring-down Spectroscopy 530 13. 4.16.1 Introduction 531 3.4.16.2 Instrumentation 531 13.4.16.3 Performance Criteria 531 13.4. 16.4 Applications 531 rge Optical Emission Spec 13.4. 17.1 Introduction 531 13. 4.17.2 Instrumentation 532 134173 Sample532 13.4. 17.4 Analytical Information 532
13.4.11 Electron Probe Microanalysis 524 13.4.11.1 Introduction 524 13.4.11.2 Instrumentation 524 13.4.11.3 Sample 524 13.4.11.4 Analytical Information 524 13.4.11.5 Performance Criteria 525 13.4.11.6 Applications 525 13.4.12 Electron Stimulated Desorption 525 13.4.12.1 Introduction 525 13.4.12.2 Instrumentation 525 13.4.12.3 Sample 526 13.4.12.4 Analytical Information 526 13.4.12.5 Performance Criteria 526 13.4.12.6 Applications 526 13.4.13 Electron Stimulated Desorption Ion Angular Distributions 526 13.4.13.1 Introduction 526 13.4.13.2 Instrumentation 527 13.4.13.3 Sample 527 13.4.13.4 Analytical Information 527 13.4.13.5 Performance Criteria 527 13.4.13.6 Applications 527 13.4.14 Ellipsometry 528 13.4.14.1 Introduction 528 13.4.14.2 Instrumentation 528 13.4.14.3 Sample 528 13.4.14.4 Analytical Information 528 13.4.14.5 Performance Criteria 529 13.4.14.6 Applications 529 13.4.15 Extended Energy Loss Fine Structure 529 13.4.15.1 Introduction 529 13.4.15.2 Instrumentation 530 13.4.15.3 Analytical Information 530 13.4.15.4 Performance Criteria 530 13.4.15.5 Applications 530 13.4.15.6 Other Techniques 530 13.4.16 Evanescent Wave Cavity Ring-down Spectroscopy 530 13.4.16.1 Introduction 531 13.4.16.2 Instrumentation 531 13.4.16.3 Performance Criteria 531 13.4.16.4 Applications 531 13.4.17 Glow Discharge Optical Emission Spectrometry 531 13.4.17.1 Introduction 531 13.4.17.2 Instrumentation 532 13.4.17.3 Sample 532 13.4.17.4 Analytical Information 532 Contents XV
XVI Contents 13.4.17.5 Performance Criteria 532 13.4. 17.6 Application 533 3.4. 17.7 Other Techniques 533 13.4. 18 High Resolution Electron Energy Loss Spectroscopy 533 13.4.18.1 Introduction 533 13.4.18.2 Instrumentation 533 134183 Sample534 3.4. 18.4 Analytical Information 534 13. 4. 18.5 Performance Criteria 534 13.4. 18.6 Applications 535 13. 4.18.7 Other Techniques 535 13.4.19 Inelastic Electron Tunneling Spectroscopy 535 3.4.19.1 Introduction 535 13.4.19.2 Instrumentation 536 134.19.3 Sample536 3.4. 19.4 Analytical Information 536 13. 19.5 Performance Criteria 536 3.4. 19.6 Applications 536 13.4.20 Inverse Photoelectron Spectroscopy 536 13.4. 20.1 Introduction 53 13. 4.20.2 Instrumentation 537 134.20.3 Sample537 3.4.20.4 Analytical Information 537 13. 4.20.5 Performance Criteria 538 13.4. 20.6 Applications 538 13. 4.21 Ion Neutralization Spectroscopy 538 13. 4.21.1 Introduction 538 3. 4.21.2 Instrumentation 538 134.21.3 Sample539 13.4.21.4 Analytical Information 539 13.4.21.5 Performance Criteria 539 13.4.21.6 Applications 539 3.4. 21.7 Other Techniques 539 13.4.22 Ion Probe Microanalysis 539 13.4. 22.1 Introduction 540 13.4. 22.2 Instrumentation 540 13. 4.22.3 Sample 540 3. 4.22. 4 Analytical Information 540 13.4.22.5 Performance Criteria 541 13.4. 22.6 Application 541 13. 22.7 Other Techniques 541 134.23 w-energy lon Scattering Spectrometry 542 3. 23.1 Introduction 542 13.4.23.2 Instrumentation 54 134.23.3 Sample542
13.4.17.5 Performance Criteria 532 13.4.17.6 Application 533 13.4.17.7 Other Techniques 533 13.4.18 High Resolution Electron Energy Loss Spectroscopy 533 13.4.18.1 Introduction 533 13.4.18.2 Instrumentation 533 13.4.18.3 Sample 534 13.4.18.4 Analytical Information 534 13.4.18.5 Performance Criteria 534 13.4.18.6 Applications 535 13.4.18.7 Other Techniques 535 13.4.19 Inelastic Electron Tunneling Spectroscopy 535 13.4.19.1 Introduction 535 13.4.19.2 Instrumentation 536 13.4.19.3 Sample 536 13.4.19.4 Analytical Information 536 13.4.19.5 Performance Criteria 536 13.4.19.6 Applications 536 13.4.20 Inverse Photoelectron Spectroscopy 536 13.4.20.1 Introduction 536 13.4.20.2 Instrumentation 537 13.4.20.3 Sample 537 13.4.20.4 Analytical Information 537 13.4.20.5 Performance Criteria 538 13.4.20.6 Applications 538 13.4.21 Ion Neutralization Spectroscopy 538 13.4.21.1 Introduction 538 13.4.21.2 Instrumentation 538 13.4.21.3 Sample 539 13.4.21.4 Analytical Information 539 13.4.21.5 Performance Criteria 539 13.4.21.6 Applications 539 13.4.21.7 Other Techniques 539 13.4.22 Ion Probe Microanalysis 539 13.4.22.1 Introduction 540 13.4.22.2 Instrumentation 540 13.4.22.3 Sample 540 13.4.22.4 Analytical Information 540 13.4.22.5 Performance Criteria 541 13.4.22.6 Application 541 13.4.22.7 Other Techniques 541 13.4.23 Low-energy Ion Scattering Spectrometry 542 13.4.23.1 Introduction 542 13.4.23.2 Instrumentation 542 13.4.23.3 Sample 542 XVI Contents
Contents XVII 13.4.23 4 Analytical Information 542 13.4.23.5 Performance Criteria 543 13.4.23.6 Application 543 13.4.23.7 Other Technique 543 13.4.24 Near Edge X-ray Absorption Spectroscopy 544 4.24.1 Introduction 544 13.4. 24.2 Instrumentation 544 34.24.3 Sample544 13.4.24 4 Analytical Information 544 13.4.24.5 Performance Criteria 544 4. 24.6 Applications 545 13. 4.24.7 Other Techniques 545 3.4. 25 Neutron Depth Profiling 545 13.4.25.1 Introduction 545 13.4.25.2 Instrumentation 545 4. 25.3 Sample 545 13.4.25.4 Analytical Information 545 3.4. 25.5 Performance Criteria 546 13. 4.25.6 Application 546 13.4. 26 Particle Induced Gamma Ray Emission 546 4.26.1 Introduction 547 13. 4.26.2 Instrumentation 547 3426.3 Sample547 13.4.26.4 Analytical Information 547 13.4.26.5 Performance Criteria 547 13.4. 26.6 Applications 548 13.4.27 Particle Induced X-ray Emission 548 3. 4.27.1 Introduction 548 13. 4.27.2 Instrumentation 548 134.273 Sample549 13.4.27 4 Spectrum 549 13. 27.5 Analytical Information 549 3. 4.27.6 Performance Criteria 550 13. 27.7 Application 550 13.4. 27.8 Other Techniques 550 4.28 Penning Ionisation Electron Spectroscopy 551 13.4.28.1 Introduction 551 3. 4.28.2 Instrumentation 551 134.283 Sample551 13. 28.4 Analytical Information 551 3. 4.285 Performance Criteria 552 13.4.28.6 Applications 552 13.4.28 7 Other Techniques 552 13. 4.29 Photoacoustic Spectroscopy 552 13.4.29.1 Introduction 552
13.4.23.4 Analytical Information 542 13.4.23.5 Performance Criteria 543 13.4.23.6 Application 543 13.4.23.7 Other Technique 543 13.4.24 Near Edge X-ray Absorption Spectroscopy 544 13.4.24.1 Introduction 544 13.4.24.2 Instrumentation 544 13.4.24.3 Sample 544 13.4.24.4 Analytical Information 544 13.4.24.5 Performance Criteria 544 13.4.24.6 Applications 545 13.4.24.7 Other Techniques 545 13.4.25 Neutron Depth Profiling 545 13.4.25.1 Introduction 545 13.4.25.2 Instrumentation 545 13.4.25.3 Sample 545 13.4.25.4 Analytical Information 545 13.4.25.5 Performance Criteria 546 13.4.25.6 Application 546 13.4.26 Particle Induced Gamma Ray Emission 546 13.4.26.1 Introduction 547 13.4.26.2 Instrumentation 547 13.4.26.3 Sample 547 13.4.26.4 Analytical Information 547 13.4.26.5 Performance Criteria 547 13.4.26.6 Applications 548 13.4.27 Particle Induced X-ray Emission 548 13.4.27.1 Introduction 548 13.4.27.2 Instrumentation 548 13.4.27.3 Sample 549 13.4.27.4 Spectrum 549 13.4.27.5 Analytical Information 549 13.4.27.6 Performance Criteria 550 13.4.27.7 Application 550 13.4.27.8 Other Techniques 550 13.4.28 Penning Ionisation Electron Spectroscopy 551 13.4.28.1 Introduction 551 13.4.28.2 Instrumentation 551 13.4.28.3 Sample 551 13.4.28.4 Analytical Information 551 13.4.28.5 Performance Criteria 552 13.4.28.6 Applications 552 13.4.28.7 Other Techniques 552 13.4.29 Photoacoustic Spectroscopy 552 13.4.29.1 Introduction 552 Contents XVII