Specimen preparation for TEM A well-prepared specimen is half done! 1
Specimen preparation for TEM A well-prepared specimen is half done! 1
厂 厂 」 L L
2
Specimens used in TEM oo6o可 φ3mm 3
Specimens used in TEM 3 3 mm
specimen 1A 1B IC ID nm 5.nm Microscopy and Microanalysis Volume 14/ Supplement S2/August 2008,pp 382-383 4
4 Microscopy and Microanalysis / Volume 14 / Supplement S2 / August 2008, pp 382-383 specimen
Why should the specimens be thin? Electron transparency ·Depth of field Chromatic aberration limited resolution Conventional TEM HRTEM/EELS Thickness(nm) <100 <20 5
Why should the specimens be thin? • Electron transparency • Depth of field • Chromatic aberration limited resolution 5 Conventional TEM HRTEM/EELS Thickness (nm) <100 <20