柔性传感器 Flexible Sensors 56
柔 性 传 感 器 Flexible Sensors
研究背景 Intracranial sensors/EEG/ECoG 脑电信号 声音 Voice recognition Eye fatigue 眼电监测 Heart rate/ECG Intraocular pressure Cardiac ablation therapy Smart lens 呼吸(气体种类,浓度,频次,幅度 心脏 Self-powered pacemaker Lung motion harvesting呼吸(频次) Blood pressure Blood flow/oxygen Blood glucose 血压,血氧,葡萄糖 Neural interfaces Drug delivery Smart wristband 可穿戴设备 手持设备Foldable electronics Mechanoreceptors 人工神经 肌电 EMG/Muscle activity Artificial nerves Plantar pressure Gait analysis 足底压力
研究背景 脑电信号 呼吸(气体种类,浓度,频次,幅度) 声音 心脏 呼吸(频次) 足底压力 血压,血氧,葡萄糖 肌电 手持设备 可穿戴设备 眼电监测 人工神经
制备技术 Sensitive Active Area 好 Organic Semiconductors-Electrodeposition 9 Perovksites →Solution Black Phosphorus Mechanical exfoliation TMDs- →Chemical exfoliation Graphene LCVD Polysilicon PECVD SiNMs- Transfer Metal Oxides +Sputtering Contacts Metal thin films Evaporation ITO Sputtering Graphene CVD EGaln Solution AgNWs CNTs Dielectric 广+ALD Sio, L.Sputtering PVA- PECVD PVDF-TrFE Solution Processes Parylene-C-Evaporation Substrate Polyimide(PI).Polyester PET ·PDMS PEN Paper Cotton ·Flexible Glass Technologies 2019,7(2),35 Common materials and respective fabrication methods
Technologies 2019, 7(2), 35 Common materials and respective fabrication methods 制备技术
6 典型应用 Transmission gain (mV G=dlV vdRs IGi (mV N-) Rigid circuits in 05 Cloud the clothes 0.4 -2 0.2 Soft sensors 01 Regime I on the skin (conventional tag) 00 .0 30507090 (MHz) (slave) Wearable body area sensor network system Heart rate ● Bluetooth BPM:62 @ ●Ps 80om回Eh Breath rate ● Sensor nodes RFID signal processing Bluetooth BPM:17 (master) Arm movement ● Count:3 Reset 2 Leg movement ● ●Movement Right:1 Reset Movement signal Left:1 Reset RFID processing 2 Soft sensors form a network
Soft sensors form a network 典型应用
汗液传感器 nature 总计 2014年至今 REVIEW ARTICLE http5:/doi.org/101038/541928-0m8-0043-y electronics 用 419 2565 h指数 92 1 10物致 23 225 6000 Wearable sweat sensors 4500 3000 Mallika Bariya23,Hnin YinYin Nyein 23 and Ali Javey 2.3* 1500 2012201320142015201620172012019 Sweat potentially contains a wealth of physiologically relevant information,but has traditionally been an underutilized resource for non-invasive health monitoring.Recent advances in wearable sweat sensors have overcome many of the historic drawbacks of sweat sensing and such sensors now offer methods of gleaning molecular-level insight into the dynamics of our bodies.Here we review key developments in sweat sensing technology.We highlight the potential value of sweat-based wearable sensors, examine state-of-the-art devices and the requirements of the underlying components,and consider ways to tackle data integ- rity issues within these systems.We also discuss challenges and opportunities for wearable sweat sensors in the development of personalized healthcare. Nature Electronics,2018,1,160-171
汗液传感器 Nature Electronics, 2018, 1, 160–171