Chapter 7 Electrochemistry 87. 3 Applications of Conductivity Measurement
Chapter 7 Electrochemistry §7.3 Applications of Conductivity Measurement
87.3 Applications of Conductivity Measurement 1. Monitor the purity of water Fabrication of VLsI Silicon wafer Ba百科 Integrated circuit
1. Monitor the purity of water Silicon wafer Integrated circuit Fabrication of VLSI §7.3 Applications of Conductivity Measurement
87.3 Applications of Conductivity Measurement 1. Monitor the purity of water Fabrication of VLSI Silicon wafe 图虫创
1. Monitor the purity of water Fabrication of VLSI §7.3 Applications of Conductivity Measurement Silicon wafer
87.3 Applications of Conductivity Measurement 1. Monitor the purity of water Fabrication of VLSI In-situ monitoring of the cleaning water Tap Distilled Deionized Pure process:H2O2/H2SO4→ DW rinse→ water water water water dilute hF→SC-1 cleaning→Dw κsm11×102-1×103<1×10+5.478×106 rinse→〉 hot dw rinse→ DW rinse→ SC-2 cleaning→ DW rinse→> dilute FF→ DW rinse 第12卷第1期 化学进展 Vol 12NO I 2000年2月 PRO GRESS N CHEM ISTRY Feb.1999 DW--deionized water 超大规模集成电路硅片溶液清洗技术的进展 SC-standard cleaning: 张树永郭永榔 (山东大学化学学院济南250100 SC-1: H./NH: SC-2: H,O/HCI 曹宝成于新好
In-situ monitoring of the cleaning process: H2O2 /H2SO4 → DW rinse → dilute HF → SC-1 cleaning → DW rinse → hot DW rinse → DW rinse → SC-2 cleaning → DW rinse → dilute HF → DW rinse. DW⎯deionized water, SC ⎯ standard cleaning： SC-1: H2O2 /NH3 ; SC-2: H2O2 /HCl. 1. Monitor the purity of water Fabrication of VLSI water Tap water Distilled water Deionized water Pure water /S·m-1 1 10-2 ~1 10-3 <1 10-4 5.478 10-6 §7.3 Applications of Conductivity Measurement
87.3 Applications of Conductivity Measurement 2. Measure the ioniza bility and dissociation constant a B a+ B C 0 c(1-a) c a M=C,,F(U+ +U)C+=ac A=a(u+UF Arrhenius suggested that the degree of At infinite dilution dissociation of an electrolyte can be m=F(U+ +U-) calculated using molar conductivity Am-a(U+ +U)F (++U)F
2. Measure the ionizability and dissociation constant m c Z F U U ( ) c + + + − + = c+ =c m = + ( ) U U F + − At infinite dilution m F U U ( ) = + + − m m ( ) ( ) U U F U U F + − + − + = = + Arrhenius suggested that the degree of dissociation of an electrolyte can be calculated using molar conductivity. §7.3 Applications of Conductivity Measurement